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Conferences > IPRSN > 2016 > ITu3A > ITu3A.5

Focused Ion Beam Milling of Gallium Phosphide Nanowaveguides for Non-linear Optical Applications

Eleonora De Luca, Reza Sanatinia, Srinivasan Anand, and Marcin Swillo

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Abstract

GaP multilayer slab waveguides were fabricated by FIB milling. Limited transmission properties of the nanostructures, due to appreciable residuals of gallium, were recovered by fs-pulsed laser exposure. The waveguides were assessed by SHG technique.

© 2016 Optical Society of America

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