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Conferences > IPRSN > 2018 > ITh2J > ITh2J.2

High-confinement high-Q silicon-rich silicon nitride nonlinear microresonators

Victor Torres-Company, Zhichao Ye, Attila Fülöp, Clemens J. Krückel, and Peter A. Andrekson

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Abstract

We show our results on high-Q high-confinement microresonators based on the silicon-rich silicon nitride (SiRN) platform, featuring broad anomalous dispersion and an enhanced nonlinear Kerr coefficient with respect to stoichiometric Si3N4 technology.

© 2018 The Author(s)

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