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Characterization of a Narrowband Resonant Cavity Enhanced Detector in the Mid-Infrared

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Abstract

We present a silicon-based multilayer microstructure working as a narrowband detector in the mid-infrared. The structure was optimized for a central wavelength of 4.26 μm and shows 6.3-fold detection enhancement compared to the metal response.

© 2018 The Author(s)

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