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Highly Efficient Grating Coupler for Silicon Nitride Photonics with Large Fabrication Tolerance

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Abstract

We demonstrate low-loss fiber-to-chip coupling via a-Si grating couplers on top of SiN waveguides for C-band TE light. The suggested simple scheme is fabrication tolerant and offers a path towards coupling efficiencies above -1 dB.

© 2021 The Author(s)

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More Like This
Fabrication-friendly High-efficiency Silicon Nitride Grating Coupler

Pengfei Xu, Yanfeng Zhang, Zengkai Shao, Lin Liu, Lidan Zhou, Chunchuan Yang, Yujie Chen, and Siyuan Yu
s1389 Conference on Lasers and Electro-Optics/Pacific Rim (CLEOPR) 2017

High Efficiency Silicon Nitride Grating Coupler with DBR

Huijuan Zhang, Chao Li, Xiaoguang Tu, Haifeng Zhou, Xianshu Luo, Mingbin Yu, and G. Q. Lo
Th1A.4 Optical Fiber Communication Conference (OFC) 2014

III-V Photodiode Illumination with Bi-layer Silicon Nitride Grating Coupler

Peichuan Yin, Victoria A. Carey, Timothy Creazzo, Peng Yao, Dennis W. Prather, and Stefan Preble
FW6B.5 Frontiers in Optics (FiO) 2021

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