Highly Efficient Grating Coupler for Silicon Nitride Photonics with Large Fabrication Tolerance

Manuel Kohli; Andreas Messner; Tatiana Buriakova; Patrick Habegger; Patrick Habegger; Daniel Chelladurai; Tobias Blatter; Jasmin Smajic; Michael Zervas; Yuriy Fedoryshyn; Ueli Koch; Juerg Leuthold; Juerg Leuthold

doi:10.1364/IPRSN.2021.IM4A.6

OSA Advanced Photonics Congress 2021
OSA Technical Digest (Optica Publishing Group, 2021),
paper IM4A.6
•https://doi.org/10.1364/IPRSN.2021.IM4A.6

Highly Efficient Grating Coupler for Silicon Nitride Photonics with Large Fabrication Tolerance

Manuel Kohli, Andreas Messner, Tatiana Buriakova, Patrick Habegger, Daniel Chelladurai, Tobias Blatter, Jasmin Smajic, Michael Zervas, Yuriy Fedoryshyn, Ueli Koch, and Juerg Leuthold

Integrated Photonics Research, Silicon and Nanophotonics 2021

Washington, DC United States
26–29 July 2021
ISBN: 978-1-943580-94-1

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Novel Fabrication Processes and Solutions II (IM4A)

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M. Kohli, A. Messner, T. Buriakova, P. Habegger, D. Chelladurai, T. Blatter, J. Smajic, M. Zervas, Y. Fedoryshyn, U. Koch, and J. Leuthold, "Highly Efficient Grating Coupler for Silicon Nitride Photonics with Large Fabrication Tolerance," in OSA Advanced Photonics Congress 2021, B. Yang, F. Leo, A. Tauke-Pedretti, S. Arafin, M. Clerici, L. Caspani, L. Busse, M. Kats, J. Fan, W. Ming (Steve) Lee, D. Caplan, N. Parsons, W. Freude, C. Tremblay, D. Hillerkuss, K. Igarashi, H. Elgala, N. Guerrero Gonzalez, R. "Patty" Stabile, K. Jaeger, R. Saive, H. Aziz, and H. Tan, eds., OSA Technical Digest (Optica Publishing Group, 2021), paper IM4A.6.

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Abstract

We demonstrate low-loss fiber-to-chip coupling via a-Si grating couplers on top of SiN waveguides for C-band TE light. The suggested simple scheme is fabrication tolerant and offers a path towards coupling efficiencies above -1 dB.

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