CMOS-Compatible Silicon Nitride Waveguide on Silicon Photonics Platform

Yuriko Maegami; Makoto Okano; Guangwei Cong; Keijiro Suzuki; Morifumi Ohno; Toshihiro Narushima; Nobuyuki Yokoyama; Miyoshi Seki; Shigeru Saitou; Minoru Ohtsuka; Hitoshi Kawashima; Koji Yamada

doi:10.1364/IPRSN.2021.ITu3A.3

OSA Advanced Photonics Congress 2021
OSA Technical Digest (Optica Publishing Group, 2021),
paper ITu3A.3
•https://doi.org/10.1364/IPRSN.2021.ITu3A.3

CMOS-Compatible Silicon Nitride Waveguide on Silicon Photonics Platform

Yuriko Maegami, Makoto Okano, Guangwei Cong, Keijiro Suzuki, Morifumi Ohno, Toshihiro Narushima, Nobuyuki Yokoyama, Miyoshi Seki, Shigeru Saitou, Minoru Ohtsuka, Hitoshi Kawashima, and Koji Yamada

Integrated Photonics Research, Silicon and Nanophotonics 2021

Washington, DC United States
26–29 July 2021
ISBN: 978-1-943580-94-1

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Advances in Integration Platforms I (ITu3A)

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Y. Maegami, M. Okano, G. Cong, K. Suzuki, M. Ohno, T. Narushima, N. Yokoyama, M. Seki, S. Saitou, M. Ohtsuka, H. Kawashima, and K. Yamada, "CMOS-Compatible Silicon Nitride Waveguide on Silicon Photonics Platform," in OSA Advanced Photonics Congress 2021, B. Yang, F. Leo, A. Tauke-Pedretti, S. Arafin, M. Clerici, L. Caspani, L. Busse, M. Kats, J. Fan, W. Ming (Steve) Lee, D. Caplan, N. Parsons, W. Freude, C. Tremblay, D. Hillerkuss, K. Igarashi, H. Elgala, N. Guerrero Gonzalez, R. "Patty" Stabile, K. Jaeger, R. Saive, H. Aziz, and H. Tan, eds., OSA Technical Digest (Optica Publishing Group, 2021), paper ITu3A.3.

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Abstract

We present applications of a CMOS-compatible SiN waveguide to an ultralow-loss fiber coupling structure and a Si-to-SiN waveguide on a Si photonics platform for C-band infrared light. We also evaluate waveguide properties for visible light.

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