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  • International Quantum Electronics Conference
  • OSA Technical Digest (Optica Publishing Group, 1984),
  • paper MHH1

Physics of Laser Annealing of Semiconductors

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Abstract

The interaction of intensive laser pulses with strongly absorbing media has been of growing importance for new material-processing techniques. A major part of the experimental work has been performed to explore the physics of pulsed-laser annealing. Many of these experiments have involved nanosecond laser pulses. It is now generally accepted that on this time scale the observed laser-induced phase transition can be entirely described by optical heating and thermal melting of the surface.

© 1984 Optical Society of America

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