Abstract
Energetic particle beams are now important, tools in a variety of areas ranging from chemical modification of electronic materials through reactive ion etching and ion implantation to probes of surface chemistry and high-molecular-weight mass spectrometry. We focus on the fundamental aspects of the particle-solid interaction process and how these aspects may be utilized to understand the chemistry of reactions resulting from high-energy collisions.
© 1987 Optical Society of America
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