Abstract
Summary: Since the report of emission spectra of rare gas halide excimers in 1974, there has been remarkable progress achieved both, on clarifying their characteristics and on developing the scaling rules of RGH excimer laser. The theoretical modeling of the excimer laser, consisting of the rate equations, the circuit equation and the Boltzmann equation governing the velocity and energy distributions of the free electrons, was introduced to explain the laser characteristics. These model involve ten’s of various atomic and molecular collision processes, so that it seems essential to study the major kinetics processes in the active media before one attempts to optimize the operating conditions or deduce the scaling rules.
© 1988 Optical Society of America
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