Abstract

Recently picosecond (ps) or femtosecond (fs) ultraviolet (UV) pulses with very high peak power of up to sub-terawatt have been produced by amplification system having rare-gas halide excimer lasers as the amplifiers^1-3. Boyer et al.³ have demonstrated that such a powerful UV laser light is a promising excitation source for generation of coherent radiation in the extreme ultraviolet (XUV) region of spectrum. They have utlized a ps laser pulse produced from an ArF laser amplification system, for the XUV laser research. The ps or fs UV pulses with a large energy of up to 1-J class presumably enable various approaches to realize XUV laser oscillation.

© 1988 Optical Society of America