EXCIMER LASER IN THE KILOWATT RANGE

D. Basting; P. Oesterlin; W. Mückenheim

International Conference on Quantum Electronics
OSA Technical Digest (Optica Publishing Group, 1988),
paper PD9

EXCIMER LASER IN THE KILOWATT RANGE

D. Basting, P. Oesterlin, and W. Mückenheim

International Quantum Electronics Conference 1988

Tokyo Japan
18–21 July 1988
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D. Basting, P. Oesterlin, and W. Mückenheim, "EXCIMER LASER IN THE KILOWATT RANGE," in International Conference on Quantum Electronics, H. Inaba, T. Yajima, and T. Ikegami, eds., OSA Technical Digest (Optica Publishing Group, 1988), paper PD9.

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Abstract

Excimer lasers with high average power are required for many purposes, especially in the domain of industrial applications. In this field reliability and durability are most important. Therefore only discharge pumped excimer lasers can be taken into consideration for this purpose.

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