Abstract

Recent developments in lateral superlattices grown on GaAs vicinal substrates^[1,2] have made it possible to fabricate quantum wire arrays with lateral dimensions less than 100 Å. One structure, the serpentine superlattice (SSL),^[2] has been developed to decrease the geometric sensitivity to growth conditions and improve uniformity. This makes the SSL, which is the topic of this work, more desirable compared to tilted superlattices.^[1] Figure 1 shows the cross sectional profile of an SSL.

© 1992 IQEC