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Optica Publishing Group
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference and Photonic Applications Systems Technologies
  • Technical Digest (CD) (Optica Publishing Group, 2004),
  • paper IMJ7
  • https://doi.org/10.1364/IQEC.2004.IMJ7

Nanostructure imaging with sub-THz coherent acoustic phonon pulses

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Abstract

We describe a novel imaging technique that employs coherent acoustic phonon pulses which are generated and detected by ultrafast optical methods. Sub-micron resolution images of Al lines lithographically etched on a Si substrate are shown.

© 2004 Optical Society of America

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