Abstract

High quality semiconductor microcavities have attracted considerable attention as a compact solid state platform for the investigation of light-matter interaction between photons and excitons in single quantum dots [1]. Owing to a combined optimization of the design (increased number of mirror pairs), the growth conditions (V/III ratio) and the dry etching process we were able to achieve record quality (Q) factors beyond 100.000 for micropillars with diameters of 4 µm and Q factors as high as 29.000 for diameters of 2 µm.

© 2007 IEEE