Atomic Nanofabrication of Periodic Structures

Claire Allred; Jason Reeves; Christopher Corder; Harold Metcalf

doi:10.1364/IQEC.2009.IPDA2

Conference on Lasers and Electro-Optics/International Quantum Electronics Conference
OSA Technical Digest (CD) (Optica Publishing Group, 2009),
paper IPDA2
•https://doi.org/10.1364/IQEC.2009.IPDA2

Atomic Nanofabrication of Periodic Structures

Claire Allred, Jason Reeves, Christopher Corder, and Harold Metcalf

International Quantum Electronics Conference 2009

Baltimore, Maryland United States
31 May–5 June 2009
ISBN: 978-1-55752-869-8

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IQEC Postdeadline Session I (IPDA)

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C. Allred, J. Reeves, C. Corder, and H. Metcalf, "Atomic Nanofabrication of Periodic Structures," in Conference on Lasers and Electro-Optics/International Quantum Electronics Conference, OSA Technical Digest (CD) (Optica Publishing Group, 2009), paper IPDA2.

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Abstract

Metastable helium has 20 eV of internal energy that destroys a resist assembled on a wafer. An optical standing wave was used to channel and focus the He^* atoms into lines separated by λ/2.

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