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Conferences > IQEC > 2009 > JThE > JThE86
  • Conference on Lasers and Electro-Optics/International Quantum Electronics Conference
  • OSA Technical Digest (CD) (Optica Publishing Group, 2009),
  • paper JThE86
  • •https://doi.org/10.1364/CLEO.2009.JThE86

Frequency Scanning Laser for High Speed Phase Shifting Interferometry

Roma Jang, Jae Wan Kim, Chu-Shik Kang, Jong-Ahn Kim, Tae Bong Eom, Jae-Eun Kim, and Hae Yong Park

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Abstract

A Multichannel frequency scanning laser which is to be used as a source in a high speed phase-shifting interferometer to measure 3D profiles of nanostructures is presented.

© 2009 Optical Society of America

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