Abstract
A suspended polySi heater is presented for use as a mid-IR light source in a microspectrometer based on a linearly variable optical filter (LVOF). Distributed electrical powering of a segmented struchrre with a specially designed suspension system is used for obtaining a temperature profile that is constant over the length of the element with a peak temperahrre significantly higher as compared to the conventional on-chip hot-wires. The integrated LVOF design results in an enhanced spectral emission and facilitates the use in the composition measurement of liquids and gases by absorption spectroscopy.
© 2020 The Author(s)
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