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Immersion-free Non-contact Imaging of Sub-wavelength Nanostructures Down to 55 nm with Super-resolution Microsphere Amplifying Lens (SMAL)

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Abstract

The resolution of optical microscopes is typically limited by the optical diffraction limit of half of the light wavelength in air. For visible light, this limit is 200 nm. Here we show that using a new, patented super-resolution microsphere amplifying lens (SMAL), we can resolve 55 nanometers features and 80 nm nanoparticles. At the same time, large area imaging has been realized by rapid scanning and image stitching.

© 2021 The Author(s)

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