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Conferences > ISOM_ODS > 2005 > WA > WA3

Development of Practical Electron Beam Recorder for High-density Optical and Magnetic Disc Mastering

Hiroaki Kitahara, Yoshiaki Kojima, Masaki Kobayashi, Masahiro Katsumura, Yasumitsu Wada, Tetsuya Iida, Kazumi Kuriyama, and Fumihiko Yokogawa

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Abstract

We developed a practical electron beam recorder, which was improved recording stability, resolution and throughput. The stable recording performance for the whole recording area and the capability for high-density recording beyond 200 Gbit/in2 were realized.

© 2005 Optical Society of America

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