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Experimental Setup for In Situ Investigation of Phase Changing Behavior in PRAM Medium by Micro-Focusing Nanosecond Time Resolved Ellipsometry

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Abstract

Experimental setup for investigating in real time the phase changing behavior of GeSbTe heated by electrical pulse of few tens ns is proposed. This system also comprises micro-focusing lens system to respond to micro spot.

© 2005 Optical Society of America

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