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Design of the 0.9THz cavity filters based on MEMS technology

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Abstract

Micro-Electro-Mechanical Systems (MEMS) is a good choice for the fabrication of THz devices due to its low cost and high processing precision. In this paper, we have proposed two types of cavity filters operating at around 0.9THz—the Photonic Bandgap (PBG) cavity filter [1,2] and the three-cavity dual mode filter[2,3]. The band-pass filters are designed based on MEMS process and numerically calculated by the finite element method. Both of them have small size(less than 1.5mm×1.5mm) and easy to be integrated with other components. Furthermore, the satisfying performances also indicate their applicational prospects in THz imaging, radar and communication systems.

© 2014 Optical Society of America

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