Abstract

The fabrication and analysis of THz Integrated waveguide splitter using EMXT structure is described in this paper. The basic principle of waveguide splitter is analyzed and two types of THz integrated waveguide splitter using EMXT structure are designed. Low-cost micro-electromechanical systems (MEMS) process is utilized to fabricate the proposed structure with high precision and quality. The performance of the fabricated device was verified by Ansoft HFSS simulation based on Finite Element Method. The simulation results show the antenna has a good performance in the frequency band of 0.485-0.515THz. Voltage standing wave ratio(VSWR) is less than 1.25, the amplitude difference of two output ports is less than 0.1dB, and the phase difference of two output ports is less than 1.2 deg.

© 2014 Optical Society of America