Abstract

The supplementary zones surround an ordinary Fresnel Zone Plate (FZP) are used to improve the optical resolution at focus. Based on the Fresnel-Kirchhoff diffraction formula, an optimization model is used to design the supplementary zones-included FZP (SZFZP). The model will be examined by comparing the simulations with the measurements in visible region. Then, this model is used to design the SZFZP for extreme ultraviolet (EUV) light. The ability to fabricate the FZP for applications in EUV light will be demonstrated. In addition, the simulated performance of the SZFZP in EUV region will be shown in this paper.

© 2014 Japan Society of Applied Physics, Optical Society of America