Abstract

Early detection as well as identification of biomolecules is very important for many applications such as medical diagnostics, virus and bacteria detection and so on. Photonic crystal (PhC) based resonator has attracted great attention due to its strong light confinement, high quality factor and small modal volumes [1]. As compared to other types of biosensors such as multiple optical mode waveguides, Mach-Zehnder interferometers and Young interferometers, PhC based biosensors have advantages of small size, high sensitivity and CMOS compatible. The schematic of our proposed device structure is shown in Fig. 1 where (a) cavity type PhC resonator, (b) defect type PhC resonator and Fig. 2 are the SEM images of cavity type resonator.

© 2015 Japan Society of Applied Physics, Optical Society of America