Abstract

Nanophotonics has been extensively researched in the past decades owing to the rapid development of the precision nanofabrication techniques, such as focused-ion beam milling and electron-beam lithography. However, it was limited by some disadvantages, such as high cost and low productivity. Therefore, a facile and economics method, nanosphere lithography (NSL) [1], for fabricating multiple nanostructures has been reported. Polystyrene nanospheres, with diameters of several hundred nanometers, were aligned into a monolayer. By using close-packed polystyrene nanospheres array as a mask, periodic metal bowties can be fabricated after metal evaporation and nanospheres lift-off.

© 2017 Japan Society of Applied Physics, Optical Society of America