Abstract
We have reported a low loss Si wire arrayed waveguide grating (AWG) using parabolic rib waveguide taper [1] to realize 100GHz-class channel spacing. We proposed recently a more simple structure using multi-mode interference coupler with minimum terrace area [2] for loss reduction. In this report we demonstrate an experimental results showing lower loss obtained by foundry dependent improved fabrication process for the latter device.
© 2017 Japan Society of Applied Physics, Optical Society of America
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