Abstract

Low-loss optical nanoantennas composed of high index dielectrics have attracted much attention as an alternative to plasmonic antennas that often suffer from losses of noble metals. Among several high-index dielectrics, Si has some advantages such as earth abundance, CMOS- compatibility and most importantly, the small imaginary part of the permittivity in the optical regime. However, the previously developed fabrication methods have problems in the control of the size, shape and crystallinity and in the scalability for mass production.

© 2018 The Japan Society of Applied Physics