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Conferences > JSAP > 2021 > PDPIC > 10p_N405_2

Thermal resistance reduction of membrane FP laser bonded by a-Si nano-film assisted surface activated bonding

Weicheng Fang, Naoki Takahashi, Yoshitaka Ohiso, Tomohiro Amemiya, and Nobuhiko Nishiyama

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Abstract

Replacing conventional electrical global wiring to optical wiring is a promising solution to overcome interconnect bottleneck of Si-LSIs.

© 2021 Japan Society of Applied Physics, The Optical Society (OSA)

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