Abstract

Quantitative surface analysis has been the goal of several research groups using ion beam sputtering followed by laser photoionization. Published work has demonstrated trace level detection limits using both resonance and non-resonance ionization schemes.(1-4) Quantification of surface layers by SIMS requires that the standards be matrix matched to the unknowns. The reason for this is that in SIMS, the ionization process is intimately tied to the sputtering process. Resonance ionization requires calibration standards, however since the sputtering and ionization steps are separated, calibrations can be obtained that cover a wide range of matrices. Non-resonance on the other hand can use internal ratios to the matrix elements to provide rapid survey analyses. This work compares resonance and nonresonance ionization methods with SIMS for a silver/gold alloy system.

© 1990 Optical Society of America