Abstract

Laser induced fluorescence as a selective and sensitive diagnostic tool is used for ion beam analysis downstream from the skimmer in an ICPMS. Using selected spectral lines, analyte atoms and ions and Ar metastable atoms are measured for a range of ICP operating conditions, vacuum pressures and over a wide range of element’s masses. To our knowledge, optical measurements of ions extracted from an ICP, either by emission [1-2] or by laser induced fluorescence [3-4], were limited to the first stage of ion extraction and only few probe elements were chosen.

© 1996 Optical Society of America