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Conferences > LAOP > 2012 > LS4C > LS4C.4

Low-cost Polymer Fresnel Microlens Array Fabricated by Maskless Lithography

G.A. Cirino, S.A. Lopera, L.G. Neto, A.N. Montagnoli, and R.D. Mansano

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Abstract

This work presents the fabrication of 8X8 PDMS Fresnel microlens array (MLA) by maskless lithographic system. The FWHM intensity values of each spot present a deviation of 8%. Such a MLA can be applied as Shack-Hartmann wavefront sensor and to enhance the efficiency of detector arrays.

© 2012 Optical Society of America

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