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Conferences > LAOP > 2016 > LTu4A > LTu4A.15

Measurement of the slope of transparent micro-structures using parallel phase shifting interferometry

L. García Lechuga, G. Reséndiz López, O. Delgado Vasallo, M. A. Sandoval Hernández, L. A. Bonilla Jiménez, J. A. Martínez Domínguez, V.H. Flores Muñoz, H. A. Mosqueda Altamirano, and N. I. Toto Arellano

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Abstract

In this research we implemented a two-step phase shifting system based on two cyclic-path coupled interferometers for slope measurements of transparent samples. The optical system generates two π-shifted interferograms, and the phase shift between interferograms is obtained by rotating a linear polarizer. We analyzed the cases of four patterns with shifts of π/2 captured in two shots; the optical phase was processed by a four-step algorithm. In order to present the capabilities of the system, results obtained for slope for transparent microscopic samples are presented.

© 2016 Optical Society of America

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