Laser Diagnostics of Radio Frequency Discharges

Richard A. Gottscho

doi:10.1364/LMD.1987.WE1

Topical Meeting on Lasers in Materials Diagnostics
Technical Digest Series (Optica Publishing Group, 1987),
paper WE1
•https://doi.org/10.1364/LMD.1987.WE1

Laser Diagnostics of Radio Frequency Discharges

Richard A. Gottscho

Lasers in Material Diagnostics 1987

Albuquerque, New Mexico United States
11–12 February 1987
ISBN:

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Laser Diagnostics of Gas-Phased Processing: 2 (WE)

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R. A. Gottscho, "Laser Diagnostics of Radio Frequency Discharges," in Topical Meeting on Lasers in Materials Diagnostics, Technical Digest Series (Optica Publishing Group, 1987), paper WE1.

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Abstract

Recent applications of laser spectroscopy to the study of plasma and plasma-surface processes are reviewed. Using laser-induced fluorescence and optogalvanic spectroscopy, measurements of concentration gradients, reaction probabilities, electric fields, and process end-points have helped to elucidate plasma-chemical mechanisms.

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