Fabrication and Characterization of a Novel Nano-Probe Slide for Nano Optics

Sang-Youp Yim; Dae-Geun Kim; Eunhee Jeang; Jae-Hoon Lee; Hana Ra; Seung-Han Park

doi:10.1364/LS.2005.LTuE3

Frontiers in Optics
OSA Technical Digest Series (Optica Publishing Group, 2005),
paper LTuE3
•https://doi.org/10.1364/LS.2005.LTuE3

Fabrication and Characterization of a Novel Nano-Probe Slide for Nano Optics

Sang-Youp Yim, Dae-Geun Kim, Eunhee Jeang, Jae-Hoon Lee, Hana Ra, and Seung-Han Park

Laser Science 2005

Tucson, Arizona United States
16–21 October 2005
ISBN: 1-55752-797-0

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Nano-Optics III (LTuE)

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S. Yim, D. Kim, E. Jeang, J. Lee, H. Ra, and S. Park, "Fabrication and Characterization of a Novel Nano-Probe Slide for Nano Optics," in Frontiers in Optics, OSA Technical Digest Series (Optica Publishing Group, 2005), paper LTuE3.

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Abstract

We present a novel nano-probe structure consisting of a sub-wavelength aperture of silicon and a slide of 30nm nitride film. Probe to probe scanning with a near-field scanning optical microscope shows sub-wavelength confinement of light.

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