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Conferences > LS > 2014 > JW3A > JW3A.7

Freeform Diffractive Structure Writing through Maskless Lithography

Lee Johnson, Melissa Zaverton, Tyler Hashimoto, Alex Felli, Young Sik Kim, and Tom D. Milster

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Abstract

Printing of diffractive structures on 3D surfaces has been demonstrated using focal adjustment during i-line maskless lithography. A diffractive pupil for asymmetric astrometric distortion correction was fabricated on spherical mirrors with diameters up to 50mm.

© 2014 Optical Society of America

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