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High Performance Binary Blazed Polysilicon Grating Coupler with a Silicon Nitride Filling Layer

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Abstract

A new binary blazed poly-silicon grating coupler with a silicon nitride filling layer was proposed. Compared with typical binary blazed silicon grating coupler, it can reduce the coupling angle of around 6o, and still retain a high fiber coupling efficiency (~ 73 %) and good 1dB bandwidth (10 nm).

© 2015 Optical Society of America

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