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Conferences > LS > 2016 > JW4A > JW4A.127

Grating Design for 3-D Interconnections of Waveguides in Overlaid Chips Using the RCWA-EIS Method

Congshan Wan, Thomas K. Gaylord, and Muhannad S. Bakir

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Abstract

The rigorous coupled-wave analysis – equivalent-index-slab (RCWA-EIS) method is used to determine the diffraction efficiencies of gratings for 3-D coupling between overlaid chips. The simulation results are validated by FDTD calculations.

© 2016 Optical Society of America

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