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Grating Design for 3-D Interconnections of Waveguides in Overlaid Chips Using the RCWA-EIS Method

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The rigorous coupled-wave analysis – equivalent-index-slab (RCWA-EIS) method is used to determine the diffraction efficiencies of gratings for 3-D coupling between overlaid chips. The simulation results are validated by FDTD calculations.

© 2016 Optical Society of America

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