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Diffraction Gratings Prepared by HR-LIPSS for New Surface Plasmon-Polariton Photodetectors & Sensors

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Abstract

New method based on HR-LIPSS for diffraction grating formation on preliminary fabricated p-n junction on Si substrate are suggested. This allows to produce surface plasmon-polariton photodetectors based on periodically corrugated thin metal plasmon-carrying films.

© 2016 Optical Society of America

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