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Robust Sub-Wavelength Grating Coupler for On-Chip Silicon Nitride Waveguides

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Abstract

A sub-wavelength grating (SWG) coupler is designed for coupling from a lensed fiber to an on-chip SiN waveguide. The designed SWG is compared with an inverse taper and analyzed for fabrication inaccuracies and misalignment conditions.

© 2019 The Author(s)

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