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Electrophysical Anisotropy of Periodic Surface Structures Induced by Femtosecond Laser on Amorphous Silicon

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Abstract

Amorphous silicon films were modified by femtosecond laser pulses. Revealed on irradiated surface are micron-scale laser-induced periodic structures that affect anisotropy of dark conductivity, photoconductivity and carrier mobility within the film.

© 2020 The Author(s)

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