Proposal for a complete 3D surface reconstruction using images from a scanning electron microscope (SEM)

Mayra Yucely Beb; Sounkalo Dembélé; Akkiz Bekel; Isabelle Jouffroy-Bapicot; Sébastien Thibaud; Nadine Piat; Olivier Lehmann; Jean-Yves Rauch; Patrick Rougeot; Louis-Marie Lebas; Cyril Langlois; Lucian Roiban; Clémentine Fellah; Gilles Cuny; Karine Masenelli-Varlot

doi:10.1364/FIO.2022.JW5A.69

Frontiers in Optics + Laser Science 2022 (FIO, LS)
Technical Digest Series (Optica Publishing Group, 2022),
paper JW5A.69
•https://doi.org/10.1364/FIO.2022.JW5A.69

Proposal for a complete 3D surface reconstruction using images from a scanning electron microscope (SEM)

Mayra Yucely Beb, Sounkalo Dembélé, Akkiz Bekel, Isabelle Jouffroy-Bapicot, Sébastien Thibaud, Nadine Piat, Olivier Lehmann, Jean-Yves Rauch, Patrick Rougeot, Louis-Marie Lebas, Cyril Langlois, Lucian Roiban, Clémentine Fellah, Gilles Cuny, and Karine Masenelli-Varlot

Laser Science 2022

Rochester, New York United States
17–20 October 2022
ISBN: 978-1-957171-17-3

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Joint Poster Session IVA (In person) (JW5A)

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M. Y. Beb, S. Dembélé, A. Bekel, I. Jouffroy-Bapicot, S. Thibaud, N. Piat, O. Lehmann, J. Rauch, P. Rougeot, L. Lebas, C. Langlois, L. Roiban, C. Fellah, G. Cuny, and K. Masenelli-Varlot, "Proposal for a complete 3D surface reconstruction using images from a scanning electron microscope (SEM)," in Frontiers in Optics + Laser Science 2022 (FIO, LS), Technical Digest Series (Optica Publishing Group, 2022), paper JW5A.69.

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Abstract

A three-dimensional model enables the development of accurate solutions to have more information about the thickness, texture, and characteristics of small-size samples for education and metrology applications. This project proposes an idea to obtain a complete 3D surface reconstruction using the application of Pollen 3D for the scanning electron microscope (SEM) images with high magnification. The main objective is to have a set of images of the complete 360° rotation of the sample with a robot inside the chamber of the SEM. Simulation SEM images with Blender (open source application) are proposed for results validation.

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