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Conferences > LS > 2022 > JW5A > JW5A.75

Photolithography of Nanophotonic Lithium Niobate Films Optical Strip Waveguide

Evan T. Salim, Makram A. Fakhri, Ahmed C. Kadhim, Ahmad S. Azzahrani, and Forat H. Alsultany

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Abstract

In this part, the process of preparing LiNbO3 in the laboratory is defined. The morphological analysis showed that a particle size of the deposited nanomaterials could be found in the range of 30-130nm.

© 2022 The Author(s)

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