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Conferences > LTST > 2012 > MF2C > MF2C.4

Effect of laser fluence on sacrificial layer morphology in laser rear-side ablation of film

Wenjun Wang, Bing Hu, Xuesong Mei, Bin Liu, and Zibao Wang

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Abstract

In this paper, laser rear-side ablation of metallic films with the sacrificial layer is proposed. The effect of laser fluence on the sacrificial layer-polymer is investigated. Micro-lens arrays are fabricated on the polymer surface.

© 2012 Optical Society of America

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