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Fabrication of microfluidic systems with arbitrary 3D geometries inside fused silica using femtosecond laser direct writing

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Abstract

In recent years, microfluidic systems for controlling and manipulating tiny volumes of liquids with high precision have attracted significant attention due to their capability of downsizing both chemistry and biology. Microfluidic systems are frequently fabricated on PDMS substrate using soft-lithography-based technologies. However, such technologies are inherently planar fabrication technologies and therefore they are difficult to be used for fabrication 3D microfluidic structures. An elegant solution to this problem is to use femtosecond laser direct writing in transparent substrates by which 3D microfluidic structures can be directly created [1]. For such application, glass can be an ideal substrate material due to its excellent physical and chemical properties, such as excellent chemical stability, high mechanical strength, low optical absorption, and so on.

© 2012 Optical Society of America

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