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Optica Publishing Group
  • Imaging and Applied Optics 2018 (3D, AO, AIO, COSI, DH, IS, LACSEA, LS&C, MATH, pcAOP)
  • OSA Technical Digest (Optica Publishing Group, 2018),
  • paper JM3E.4
  • https://doi.org/10.1364/3D.2018.JM3E.4

High Resolution Ptychographic Coherent Diffractive Imaging using Table-top XUV Sources

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Abstract

We present a coherent imaging setup for extended samples achieving record-high resolution for non-periodic samples. A Siemens star pattern is imaged and the Rayleigh criterion is used to provide a reliable sub-50 nm resolution claim.

© 2018 The Author(s)

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