Abstract
We investigate defect detectability using simulated deep-, vacuum-, and extreme-ultraviolet wavelengths. Improvements to a signal-to-noise ratio defect metric appear achievable down to λ = 47 nm.
© 2018 The Author(s)
PDF ArticleMore Like This
Bryan M. Barnes, Martin Y. Sohn, Francois Goasmat, Hui Zhou, Richard M. Silver, and Abraham Arceo
ATu2B.2 Applied Industrial Optics: Spectroscopy, Imaging and Metrology (AIO) 2013
John C. Stover and Douglas E. McGary
OThC6 Optical Fabrication and Testing (OF&T) 1990
Rishikesh Kulkarni, Earu Banoth, and Parama Pal
JTu2A.23 Frontiers in Optics (FiO) 2018