Abstract
To improve the efficiency of many industrial plasma processes, more insight into the plasma chemistry is required. Therefore, the detection and quantitative measurement of important species is a major challenge. We will discuss examples of species detection applying laser-based diagnostics in the mid-infrared using quantum cascade lasers (QCLs) and interband cascade lasers (ICLs). A further increase in sensitivity to detection limits of ppm down to ppt levels can be achieved by combining the lasers with cavity enhanced techniques. We present results of an ICL coupled to a V-shaped optical cavity in an optical feedback cavity enhanced absorption spectroscopy (OF-CEAS) experiment.
© 2016 Optical Society of America
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