Abstract
Energetic beams provide nonthermal conditions for film synthesis in order to achieve growth processes and material properties that cannot be obtained by using a thermal flux. However, a detailed understanding of the gas phase and surface chemistry responsible for film growth and the resulting material properties has not been achieved for the complex reaction and transport processes involved. In the following it will be shown how the deposition chemistry can be studied using localized initiation of the deposition chemistry by a VUV laser.
© 1995 Optical Society of America
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