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Interferometry for 3-D Sensing

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Abstract

Interferometric techniques can be used for performing a wide range of measurements. Measurements can be made of absolute shapes, changes in shapes, or vibrational modes. While the normal sensitivity of interferometry using visible light is fractions of micrometers, reduced sensitivity can be obtained by either using a longer wavelength light source or special interferometric techniques.

© 1985 Optical Society of America

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