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Simulation and Analysis of Thin Film Bulk Ultrasonic Transducers and Optimization Acousto-optical Coupling

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Abstract

In this paper, A finite element method (FEM) formulation was used to study the direct piezoelectric effect in the acousto-optical integrated modulators, The primary output parameters such as displacement and admittance of ultrasonic transducers were studied as a function of the frequency and numbers of thin ZnO piezoelectric films. Our 2D FEM formulation is applied to detailed numerical modeling of thin-film bulk acoustic wave (BAW) composite ultrasonic transducers. In particular, the validity of the modeling technique is demonstrated by comparing the simulated and measured displacement and admittance profiles at several frequencies. We compare the simulated displacement profiles with measurements. The results show that the periodic structure of ZnO piezoelectric thin films overcome the effect of spurious modes and maximize the Q factor. The other work, we employed the numerical solution of the electroelastic equations that govern the linear forced vibrations of piezoelectric media to simulate acousto-optic (AO) effect in the acousto-optical integrated modulators, the acousto-optic figure of merit (FOM) as a function of effective AO coefficient and the velocity of the acoustic wave in the oxide crystals (LiNbO3) is also investigated. The acousto-optic FOM can reveal the optimal crystal orientation to maximize coupling between the optical and acoustic waves. The FEM model examines the diffraction that occurs by the optical wave traveling through an acousto-optic waveguide buried in the oxide crystals substrate supporting the bottom electrodes. Q factor increase, this is useful to improve the AO coupling ratio and apply in acousto-optical integrated modulators.

© 2013 Optical Society of America

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