Abstract
For precise micromachining as well as for marking, lasers with a diffraction limited laser output are suitabl devices if they embody an average output power of a few tens of watts. But for micro drilling with sharp edges of the holes even the next higher mode TEM01* might be the better choice for precise processing. In this paper we will discuss the possibilities for realizing high power Nd:YAG and Nd:YALO lasers in low order transverse mode operation (Fig. 1).
© 1999 Optical Society of America
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